Product Description of Phosphine CAS#7803-51-2
Phosphine (CAS# 7803-51-2, chemical formula PH₃) is a highly poisonous, flammable, and explosive gas. Its primary industrial use is as a dopant source in semiconductor processing, while it is also utilized as a fumigant in agricultural applications.
Due to its extreme toxicity and inherent hazards, phosphine must be managed under strict safety controls. Even exposure at very low levels presents serious health hazards and carries the risk of fatality.
Key Specifications
| Parameter | Electronic Grade | Industrial Grade |
| Purity | ≥99.999% | ≥99.9% |
| O₂ Content | ≤0.5 ppm | ≤50 ppm |
| H₂O Content | ≤1 ppm | ≤10 ppm |
| Total Impurities | ≤10 ppm | ≤1000 ppm |
Product Usage
1. Semiconductor Manufacturing
Serves as a doping gas source for n-type silicon, enabling precise doping with a uniformity variation of ≤0.1%.
Employed in MOCVD (Metal Organic Chemical Vapor Deposition) processes for the fabrication of GaN-based LEDs.
2. Grain Fumigation
Functions as a fumigant for stored grain, achieving up to 99.9% pest mortality at an application rate of 2 g/m³, as per OECD Guideline 633.
Offers a low-residue alternative to methyl bromide for pest management purposes.
3. Chemical Synthesis
Utilized as a catalyst in asymmetric hydrogenation reactions, including the synthesis of chiral pharmaceutical intermediates.
